Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus
-
Application No.: US15480400Application Date: 2017-04-06
-
Publication No.: US09942973B2Publication Date: 2018-04-10
- Inventor: Tamotsu Abe , Yoshifumi Ueno , Hirokazu Hosoda , Takashi Saito
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G21K1/06

Abstract:
An extreme ultraviolet light generation apparatus may be configured to generate extreme ultraviolet light by irradiating a target with a pulse laser beam outputted from a laser apparatus to generate plasma. The extreme ultraviolet light generation apparatus may include a chamber; a target supply device configured to supply a target to a plasma generation region inside the chamber; a target sensor located between the target supply device and the plasma generation region and configured to detect the target passing through a detection region; and a shield cover disposed between the detection region and the target supply device, having a through-hole that allows the target to pass through, and configured to reduce pressure waves that reach the target supply device from the plasma generation region.
Public/Granted literature
- US20170215267A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2017-07-27
Information query