Invention Grant
- Patent Title: Slurry for chemical mechanical polishing of cobalt
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Application No.: US14919526Application Date: 2015-10-21
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Publication No.: US09944828B2Publication Date: 2018-04-17
- Inventor: Elise Sikma , Witold Paw , Benjamin Petro , Jeffrey Cross , Glenn Whitener
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson; Ashlee B. Szelag
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461 ; C09G1/02 ; B24B37/04 ; C23F3/04 ; C23F3/06 ; H01L21/321

Abstract:
The invention provides a chemical-mechanical polishing composition including (a) an abrasive comprising alumina particles, silica particles, or a combination thereof, (b) a rate accelerator comprising a phosphonic acid, an N-heterocyclic compound, or a combination thereof, (c) a corrosion inhibitor comprising an amphoteric surfactant, a sulfonate, a phosphonate, a carboxylate, a fatty acid amino acid, an amine, an amide, or a combination thereof, (d) an oxidizing agent, and (e) an aqueous carrier. The invention also provides a method of polishing a substrate, especially a substrate comprising a cobalt layer, with the polishing composition.
Public/Granted literature
- US20160108286A1 SLURRY FOR CHEMICAL MECHANICAL POLISHING OF COBALT Public/Granted day:2016-04-21
Information query
IPC分类: