Invention Grant
- Patent Title: Method for producing cubic zirconia layers
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Application No.: US13497283Application Date: 2010-09-24
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Publication No.: US09945024B2Publication Date: 2018-04-17
- Inventor: Jürgen Ramm , Beno Widrig
- Applicant: Jürgen Ramm , Beno Widrig
- Applicant Address: CH Pfäffikon SZ
- Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee Address: CH Pfäffikon SZ
- Agency: Pearne & Gordon LLP
- International Application: PCT/EP2010/064136 WO 20100924
- International Announcement: WO2011/036246 WO 20110331
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/24 ; C23C14/06 ; C23C14/08 ; C23C14/32 ; C23C14/34

Abstract:
In order to produce zirconia-based layers on a deposition substrate, wherein reactive spark deposition using pulsed spark current and/or the application of a magnetic field that is perpendicular to the spark target are employed, a mixed target comprising elemental zircon and at least one stabilizer is used, or a zirconium target comprising elemental zirconium is used, wherein in addition to oxygen, nitrogen is used as the reactive gas. As an alternative, combined with the use of the mixed target, nitrogen can also be used as the reactive gas in addition to oxygen.
Public/Granted literature
- US20130153408A1 METHOD FOR PRODUCING CUBIC ZIRCONIA LAYERS Public/Granted day:2013-06-20
Information query
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