An X-ray fluorescence analysis method in which the quantity of a contained component other than the principal component in the sample is determined by using the result of measurement of X-rays emitted from a sample whose principal component is an organic component, includes: setting a quantitative value of the contained component; calculating an area occupancy ratio representing the proportion of X-rays falling onto the sample; recalculating the area occupancy ratio based on a comparison of a measured value of the scattered X-ray intensity with a theoretical value of the scattered X-ray intensity calculated using a recalculated quantitative value of the contained component and the area occupancy ratio; repeating the recalculation of the quantitative value of the contained component and the recalculation of the area occupancy ratio, and determining the quantitative value as the definite quantitative value of the contained component when the quantitative value satisfies a previously set convergence condition.