Production method of a sensor chip and computerized tomography detector
Abstract:
A sensor chip, in particular for computerized tomography detectors, including an analog-digital converter electrically connected to an element detecting radiation. A problem addressed is that of defining a sensor chip which is as cost-efficient and reliable as possible. According to an embodiment of the invention, only one single crystalline base plate is used, on which all required components of the sensor chip are applied. A through-contact between the conductor paths or the contacts of both sides of the base plate is used as applicable in order to connect the components of both sides to each other.
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