Invention Grant
- Patent Title: Imprint apparatus, method of manufacturing article and alignment apparatus
-
Application No.: US14231827Application Date: 2014-04-01
-
Publication No.: US09946156B2Publication Date: 2018-04-17
- Inventor: Hiroshi Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-078093 20130403
- Main IPC: B29C59/16
- IPC: B29C59/16 ; G03F7/00

Abstract:
The present invention provides an imprint apparatus comprising at least one first detector configured to detect a first number of first marks among a plurality of marks formed in the plurality of shot regions, a second detector having a field of view wider than that of the first detector, and configured to detect a second number of second marks different from the first marks among the plurality of marks, the second number being larger than the first number, and a controller configured to align the plurality of shot regions and the mold by using a detection result from the second detector.
Public/Granted literature
- US20140300016A1 IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE AND ALIGNMENT APPARATUS Public/Granted day:2014-10-09
Information query