Invention Grant
- Patent Title: Substrate angle alignment device, substrate angle alignment method, and substrate transfer method
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Application No.: US15127206Application Date: 2014-03-25
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Publication No.: US09947566B2Publication Date: 2018-04-17
- Inventor: Hirohiko Goto
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Applicant Address: JP Kobe-Shi
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe-Shi
- Agency: Oliff PLC
- International Application: PCT/JP2014/001714 WO 20140325
- International Announcement: WO2015/145480 WO 20151001
- Main IPC: B65G33/06
- IPC: B65G33/06 ; B65G47/51 ; H01L21/68 ; H01L21/677

Abstract:
A substrate angle alignment device includes a plurality of holding sections which hold a plurality of substrates, respectively in such a manner that the plurality of substrates are placed to be oriented horizontally and arranged vertically, a first up-down unit including a plurality of first support sections, and a second up-down unit including a plurality of second support sections. The device repeats a series of angle alignment operations in which the plurality of holding sections are rotated together to perform angle alignment of selected one of the plurality of substrates, and the first support section corresponding to the aligned substrate is moved up to lift up the substrate with the first support section. The device moves the plurality of second support sections up together to lift up the plurality of aligned substrates supported on the plurality of first support sections, with the plurality of second support sections, respectively.
Public/Granted literature
- US20170103909A1 SUBSTRATE ANGLE ALIGNMENT DEVICE, SUBSTRATE ANGLE ALIGNMENT METHOD, AND SUBSTRATE TRANSFER METHOD Public/Granted day:2017-04-13
Information query
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