Invention Grant
- Patent Title: Field-effect semiconductor device having pillar regions of different conductivity type arranged in an active area
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Application No.: US15424533Application Date: 2017-02-03
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Publication No.: US09947741B2Publication Date: 2018-04-17
- Inventor: Hans-Joachim Schulze , Franz-Josef Niedernostheide , Anton Mauder , Joachim Weyers , Franz Hirler , Markus Schmitt , Armin Willmeroth , Björn Fischer , Stefan Gamerith
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/06 ; H01L29/78 ; H01L29/10 ; H01L29/40 ; H01L29/66 ; H01L29/08

Abstract:
In a field-effect semiconductor device, alternating first n-type and p-type pillar regions are arranged in the active area. The first n-type pillar regions are in Ohmic contact with the drain metallization. The first p-type pillar regions are in Ohmic contact with the source metallization. An integrated dopant concentration of the first n-type pillar regions substantially matches that of the first p-type pillar regions. A second p-type pillar region is in Ohmic contact with the source metallization, arranged in the peripheral area and has an integrated dopant concentration smaller than that of the first p-type pillar regions divided by a number of the first p-type pillar regions. A second n-type pillar region is arranged between the second p-type pillar region and the first p-type pillar regions, and has an integrated dopant concentration smaller than that of the first n-type pillar regions divided by a number of the first n-type pillar regions.
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