Invention Grant
- Patent Title: Structure and method to reduce shorting in STT-MRAM device
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Application No.: US15493270Application Date: 2017-04-21
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Publication No.: US09947863B2Publication Date: 2018-04-17
- Inventor: Anthony J. Annunziata , Gen P. Lauer , Nathan P. Marchack
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L43/12 ; H01L43/10 ; G11C11/16

Abstract:
A method of making a magnetic random access memory (MRAM) device includes depositing a spacer material on an electrode; forming a magnetic tunnel junction (MTJ) on the spacer material that includes a reference layer in contact with the spacer material, a free layer, and a tunnel barrier layer; patterning a hard mask on the free layer; etching the MTJ and the spacer material to transfer a pattern of the hard mask into the MTJ and the spacer material; forming an insulating layer along a sidewall of the hard mask, the MTJ, and the spacer material; disposing an interlayer dielectric (ILD) on and around the hard mask, MTJ, and spacer material; etching through the ILD to form a trench that extends to a surface and sidewall of the hard mask and a sidewall of a portion of the MTJ; and disposing a metal in the trench to form a contact electrode.
Public/Granted literature
- US20170222134A1 STRUCTURE AND METHOD TO REDUCE SHORTING IN STT-MRAM DEVICE Public/Granted day:2017-08-03
Information query
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