Invention Grant
- Patent Title: Packaged microsystems
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Application No.: US15127237Application Date: 2015-03-17
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Publication No.: US09950922B2Publication Date: 2018-04-24
- Inventor: Yogesh Gianchandani , Tao Li , Yushu Ma
- Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Matheson Keys Daffer & Kordzik PLLC
- Agent Kelly Kordzik
- International Application: PCT/US2015/021100 WO 20150317
- International Announcement: WO2015/142949 WO 20150924
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B7/02 ; B81C3/00 ; H01L23/043 ; H01L23/053

Abstract:
A sub-millimeter packaged microsystem includes a microsystem located in a sealed cavity defined between first and second portions of a micropackage. One or both micropackage portions can be fabricated from a metal suitable for use in a harsh environment, such as an oil well environment. The microsystem includes electronic components and can be configured to communicate with external components through a wall of the micropackage by wireless communication or by conductive feedthroughs. Pluralities of microsystems, first micropackage portions, and/or second micropackage portions are simultaneously placed during a batch assembly process. The assembly process may include micro-crimping the first and second micropackaging portions together without the need for bonding materials and related process steps.
Public/Granted literature
- US20170174506A1 PACKAGED MICROSYSTEMS Public/Granted day:2017-06-22
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