Invention Grant
- Patent Title: Composition for forming Mn and Nb co-doped PZT-based piezoelectric film
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Application No.: US15127531Application Date: 2015-03-12
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Publication No.: US09950959B2Publication Date: 2018-04-24
- Inventor: Toshihiro Doi , Hideaki Sakurai , Nobuyuki Soyama
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JP2014-067835 20140328
- International Application: PCT/JP2015/057297 WO 20150312
- International Announcement: WO2015/146607 WO 20151001
- Main IPC: C04B35/491
- IPC: C04B35/491 ; C04B35/622 ; C04B35/624 ; C04B35/626 ; C04B35/632 ; C04B35/634 ; C04B35/64 ; H01L41/187 ; H01L41/318

Abstract:
A composition used for forming a PZT-based piezoelectric film formed of Mn and Nb co-doped composite metal oxides is provided, in which the composition includes PZT-based precursors so that a metal atom ratio (Pb:Mn:Nb:Zr:Ti) in the composition satisfies (1.00 to 1.25):(0.002 to 0.056):(0.002 to 0.056):(0.40 to 0.60):(0.40 to 0.60), a rate of Mn is from 0.20 to 0.80 when the total of metal atom rates of Mn and Nb is 1, a rate of Zr is from 0.40 to 0.60 when the total of metal atom rates of Zr and Ti is 1, and the total rate of Zr and Ti is from 0.9300 to 0.9902 when the total of metal atom rates of Mn, Nb, Zr, and Ti is 1.
Public/Granted literature
- US10112872B2 Composition for forming Mn and Nb co-doped PZT-based piezoelectric film Public/Granted day:2018-10-30
Information query
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