Invention Grant
- Patent Title: Method for preparing structured graphene on SiC substrate based on Cl2 reaction
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Application No.: US14397633Application Date: 2012-12-31
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Publication No.: US09951418B2Publication Date: 2018-04-24
- Inventor: Hui Guo , Keji Zhang , Yuming Zhang , Pengfei Deng , Tianmin Lei , Fengqi Zhang
- Applicant: Xidian University
- Applicant Address: CN Xi'an, Shaanxi
- Assignee: XIDIAN UNIVERSITY
- Current Assignee: XIDIAN UNIVERSITY
- Current Assignee Address: CN Xi'an, Shaanxi
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: CN201210162173 20120523
- International Application: PCT/CN2012/087971 WO 20121231
- International Announcement: WO2013/174139 WO 20131128
- Main IPC: C23C16/26
- IPC: C23C16/26 ; C01B32/186 ; C01B32/188

Abstract:
Disclosed is a method for preparing structured graphene on a SiC substrate on the basis of Cl2 reaction, the procedures are as follows: firstly, performing standard cleaning to a SiC sample chip; depositing a layer of SiO2 on the surface of the SiC sample chip and engraving a figure window on the SiO2 layer; then arranging the windowed sample chip in a quartz tube, introducing a mixed gas of Ar and Cl2 into the quartz tube, reacting the bare SiC with Cl2 for 3-8 min at 700-1100° C. to generate a carbon film; arranging the generated carbon film in Ar gas, annealing for 10-30 min at 1000-1200° C. to generate the structured graphene on the window on the carbon film. The method is simple and safe; the generated structured graphene has a smooth surface and low porosity and can be used for making microelectronic devices.
Public/Granted literature
- US20150132506A1 Method for Preparing Structured Graphene on SiC Substrate Based on CL2 Reaction Public/Granted day:2015-05-14
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