Invention Grant
- Patent Title: Strain sensing element and pressure sensor
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Application No.: US14887749Application Date: 2015-10-20
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Publication No.: US09952030B2Publication Date: 2018-04-24
- Inventor: Shiori Kaji , Hideaki Fukuzawa , Tomohiko Nagata , Akio Hori , Yoshihiko Fuji
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-061453 20150324
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01B7/24 ; G01B7/16 ; G01L9/16

Abstract:
According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.
Public/Granted literature
- US20160282101A1 STRAIN SENSING ELEMENT AND PRESSURE SENSOR Public/Granted day:2016-09-29
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