Compounders for enhancing generation of chemical species

Invention Grant

US09952508B2 Compounders for enhancing generation of chemical species 有权

Patent Title: Compounders for enhancing generation of chemical species
Application No.: US15025518

Application Date: 2014-09-30
Publication No.: US09952508B2

Publication Date: 2018-04-24
Inventor: Satoshi Enomoto , Yusuke Suga
Applicant: TOYO GOSEI CO., LTD.
Applicant Address: JP Ichikawa-Shi, Chiba
Assignee: Toyo Gosei Co., Ltd.
Current Assignee: Toyo Gosei Co., Ltd.
Current Assignee Address: JP Ichikawa-Shi, Chiba
Agency: TraskBritt, P.C.
International Application: PCT/JP2014/005008 WO 20140930
International Announcement: WO2015/045426 WO 20150402
Main IPC: G03F7/004
IPC: G03F7/004 ; G03F7/038 ; C07C217/18 ; C08F220/30 ; C07C59/64 ; H01L21/02 ; H01L21/311 ; H01L21/027 ; G03F7/039 ; G02F1/1333

Abstract:

A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.

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IPC分类:

G	物理
G03	摄影术；电影术；利用了光波以外其他波的类似技术；电记录术；全息摄影术
G03F	图纹面的照相制版工艺，例如，印刷工艺、半导体器件的加工工艺；其所用材料；其所用原版；其所用专用设备（照相排版装置入B41B；为摄影用的感光材料或处理入G03C；电记录、感光层或处理入G03G）
G03F7/00	图纹面，例如，印刷表面的照相制版如光刻工艺；图纹面照相制版用的材料，如：含光致抗蚀剂的材料；图纹面照相制版的专用设备（用于特殊工艺的光致抗蚀剂结构见相关的位置，例如，B44C，H01L，例如，H01L21/00，H05K）
G03F7/004	.感光材料（G03F7/12，G03F7/14优先）