Invention Grant
- Patent Title: Bonding P-type and N-type sheets to form complementary circuits
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Application No.: US15375118Application Date: 2016-12-11
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Publication No.: US09954033B2Publication Date: 2018-04-24
- Inventor: Hjalmar Edzer Ayco Huitema
- Applicant: Polyera Corporation
- Applicant Address: US IL Skokie
- Assignee: FLEXTERRA, INC.
- Current Assignee: FLEXTERRA, INC.
- Current Assignee Address: US IL Skokie
- Agency: Marshall, Gerstein & Borun LLP
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L27/28 ; H01L51/00 ; H01L51/05 ; H01L29/786

Abstract:
A method for fabricating at least a portion of a complementary circuit, such as a complementary inverter circuit, includes fabricating a first sheet and a second sheet. Each of the sheets includes metal layers, a dielectric layer, and a semiconductor channel layer, configured so as to form a plurality of transistors of a respective polarity (i.e., P-type for one sheet, N-type for the other). The method also includes placing a layer of conductive material, such as anisotropic conducting glue (ACG) or anisotropic conducting foil (ACF), on the first sheet, and bonding at least a portion of the second sheet to the first sheet such that the conductive material is disposed between and in contact with the top-most metal layers of the first and second sheets. Separately fabricating the two sheets of different polarity may improve yields and/or decrease costs as compared to fabricating both polarities on a single substrate.
Public/Granted literature
- US20170236874A1 Bonding P-Type and N-Type Sheets to Form Complementary Circuits Public/Granted day:2017-08-17
Information query
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