Invention Grant
- Patent Title: Nano- and micro-electromechanical resonators
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Application No.: US15646890Application Date: 2017-07-11
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Publication No.: US09954512B2Publication Date: 2018-04-24
- Inventor: Matteo Rinaldi , Zhenyun Qian , Yu Hui
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Posternak Blankstein & Lund LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/13 ; H01L41/18 ; H03H9/19 ; H01L41/187 ; G01J5/44

Abstract:
A resonator including a piezoelectric plate and an interdigital electrode is provided. A ratio between a thickness of the plate and a pitch of the interdigital electrode may be from about 0.5 to about 1.5. A radiation detector including a resonator and an absorber layer capable of absorbing at least one of infrared and terahertz radiation is provided. A resonator including a piezoelectric plate and a two-dimensional electrically conductive material is provided.
Public/Granted literature
- US20170331450A1 NANO- AND MICRO-ELECTROMECHANICAL RESONATORS Public/Granted day:2017-11-16
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