Invention Grant
- Patent Title: Method for manufacturing a capacitive transducer
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Application No.: US14463420Application Date: 2014-08-19
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Publication No.: US09955949B2Publication Date: 2018-05-01
- Inventor: Kazutoshi Torashima , Takahiro Akiyama , Kenji Hasegawa , Kazuhiko Kato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2013-173190 20130823; JP2013-185796 20130908
- Main IPC: H04R31/00
- IPC: H04R31/00 ; A61B8/00 ; B06B1/02 ; B81C1/00 ; A61B5/00 ; H02N1/08

Abstract:
A method for manufacturing a capacitive transducer is provided having a structure in which a vibrating film is supported to be able to vibrate. The method includes forming a sacrificial layer on a first electrode; forming a layer on the sacrificial layer, the layer forming at least part of the vibrating film; removing the sacrificial layer, including forming etching holes to communicate with the sacrificial layer; forming a sealing layer for sealing the etching holes; and etching at least part of the sealing layer. Before forming the sealing layer, an etching stop layer is formed on the layer forming at least part of the vibrating film. In the step of etching at least part of the sealing layer, the sealing layer is removed until the etching stop layer is reached.
Public/Granted literature
- US20150057547A1 CAPACITIVE TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-02-26
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