- Patent Title: Electromechanical transducer element, liquid discharge head, liquid discharge device, method for producing electromechanical transducer film, and method for producing liquid discharge head
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Application No.: US15370025Application Date: 2016-12-06
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Publication No.: US09956774B2Publication Date: 2018-05-01
- Inventor: Satoshi Mizukami
- Applicant: Satoshi Mizukami
- Applicant Address: JP Tokyo
- Assignee: Ricoh Company, Ltd.
- Current Assignee: Ricoh Company, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2015-246661 20151217
- Main IPC: H01L41/187
- IPC: H01L41/187 ; B41J2/14 ; B41J2/16

Abstract:
An electromechanical transducer element includes an electromechanical transducer film formed of PZT, wherein Ti/(Zr+Ti) in the electromechanical transducer film is greater than or equal to 45% and less than or equal to 55%, and wherein, when a total of peak intensity values obtained by θ-2θ measurement is set to be 1, for an orientation ratio of a (100) plane orientation calculated based on a ratio of the peak intensity value of each orientation, Δρ(100) is less than or equal to 5%, wherein Δρ(100) is a gradient with respect to the (100) plane orientation in an array direction, and the ratio of each peak intensity value of each orientation is represented by ρ(hkl)=I(hkl)/ΣI(hkl), where ρ(hkl) is a degree of orientation in an (hkl) plane orientation, I(hkl) is the peak intensity value of the orientation, and ΣI(hkl) is the total of the peak intensity values.
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