Electromechanical transducer element, liquid discharge head, liquid discharge device, method for producing electromechanical transducer film, and method for producing liquid discharge head
Abstract:
An electromechanical transducer element includes an electromechanical transducer film formed of PZT, wherein Ti/(Zr+Ti) in the electromechanical transducer film is greater than or equal to 45% and less than or equal to 55%, and wherein, when a total of peak intensity values obtained by θ-2θ measurement is set to be 1, for an orientation ratio of a (100) plane orientation calculated based on a ratio of the peak intensity value of each orientation, Δρ(100) is less than or equal to 5%, wherein Δρ(100) is a gradient with respect to the (100) plane orientation in an array direction, and the ratio of each peak intensity value of each orientation is represented by ρ(hkl)=I(hkl)/ΣI(hkl), where ρ(hkl) is a degree of orientation in an (hkl) plane orientation, I(hkl) is the peak intensity value of the orientation, and ΣI(hkl) is the total of the peak intensity values.
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