Invention Grant
- Patent Title: Imprinting method and curable composition for imprinting
-
Application No.: US14647943Application Date: 2013-11-26
-
Publication No.: US09957340B2Publication Date: 2018-05-01
- Inventor: Keiko Chiba , Toshiki Ito , Akiko Iimura , Youji Kawasaki , Keiji Yamashita , Jun Kato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2012-263533 20121130; JP2013-216663 20131017; JP2013-216664 20131017; JP2013-242001 20131122
- International Application: PCT/JP2013/082311 WO 20131126
- International Announcement: WO2014/084395 WO 20140605
- Main IPC: H01L21/027
- IPC: H01L21/027 ; C08F20/18 ; B29C59/02 ; C08F222/20 ; C08F222/10 ; B29C59/00 ; B29C59/16 ; G03F7/028 ; G03F7/029 ; C08F220/18 ; C09D133/08 ; C08L33/08 ; G03F7/00 ; G03F7/027 ; B29K33/04 ; B29L11/00 ; B29L31/34 ; B29K33/00

Abstract:
An imprinting method for forming a pattern of a cured product by irradiating a curable composition for imprinting disposed on a substrate with light while the curable composition is in contact with a mold having surface asperities and removing the mold from a cured product of the curable composition. The method includes bringing the mold into contact with the curable composition in a condensable gas atmosphere, wherein the curable composition for imprinting has a viscosity in the range of 1 cP to 40 cP in air at 23° C., and the condensable gas is introduced between the mold and the curable composition such that the curable composition for imprinting has a condensable gas solubility (gas/(curable composition+gas)) (g/g) in the range of 0.1 to 0.4.
Public/Granted literature
- US20150315322A1 IMPRINTING METHOD AND CURABLE COMPOSITION FOR IMPRINTING Public/Granted day:2015-11-05
Information query
IPC分类: