Invention Grant
- Patent Title: Method for producing thermoelectric layers
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Application No.: US13381468Application Date: 2010-06-10
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Publication No.: US09957602B2Publication Date: 2018-05-01
- Inventor: Ralph Teunissen , Gerhard Span
- Applicant: Ralph Teunissen , Gerhard Span
- Applicant Address: DE Stuttgart
- Assignee: MAHLE INTERNATIONAL GMBH
- Current Assignee: MAHLE INTERNATIONAL GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Lucas & Mercanti, LLP
- Priority: DE102009031302 20090630
- International Application: PCT/EP2010/058142 WO 20100610
- International Announcement: WO2011/000676 WO 20110106
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C23C14/06 ; H01L35/16 ; H01L35/22 ; H01L35/34

Abstract:
The invention relates to a method for producing thermoelectric layers by depositing thermoelectric material on a substrate by means of sputter deposition. In order to create a method for producing thermoelectric layers that are better suited for use in thermogenerators, and in particular have higher Seebeck coefficients, the production of a target made of thermoelectric material is proposed by mixing at least two powdered starting materials having a particle size from 0.01 μm-5000 μm, while coupling in energy and depositing the thermoelectric material from the target on the substrate by way of magnetron sputter deposition.
Public/Granted literature
- US20120152729A1 Method for Producing Thermoelectric Layers Public/Granted day:2012-06-21
Information query
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