Method for producing thermoelectric layers
Abstract:
The invention relates to a method for producing thermoelectric layers by depositing thermoelectric material on a substrate by means of sputter deposition. In order to create a method for producing thermoelectric layers that are better suited for use in thermogenerators, and in particular have higher Seebeck coefficients, the production of a target made of thermoelectric material is proposed by mixing at least two powdered starting materials having a particle size from 0.01 μm-5000 μm, while coupling in energy and depositing the thermoelectric material from the target on the substrate by way of magnetron sputter deposition.
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