Invention Grant
- Patent Title: Apparatus to improve substrate temperature uniformity
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Application No.: US14484613Application Date: 2014-09-12
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Publication No.: US09957615B2Publication Date: 2018-05-01
- Inventor: Gwo-Chuan Tzu , Kazuya Daito , Sang-Hyeob Lee
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C16/46
- IPC: C23C16/46 ; C23C16/455 ; C23C16/458 ; H01L21/687

Abstract:
Apparatus for improving substrate temperature uniformity in a substrate processing chamber are provided herein. In some embodiments, a substrate support processing chamber may include a chamber body having a bottom portion and a sidewall having a slit valve opening to load and unload substrates, a pin lift mechanism, disposed in a pin lift mechanism opening formed in the bottom portion of the chamber body, having a plurality of substrate support pins coupled to the pin lift mechanism, a movable substrate support heater having substrate support portion and a shaft, and a cover plate disposed about the shaft of the movable substrate support, wherein the cover plate covers the pin lift mechanism and pin lift mechanism opening.
Public/Granted literature
- US20150075432A1 APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY Public/Granted day:2015-03-19
Information query
IPC分类: