Invention Grant
- Patent Title: System and method for crystalline sheet growth using a cold block and gas jet
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Application No.: US14226991Application Date: 2014-03-27
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Publication No.: US09957636B2Publication Date: 2018-05-01
- Inventor: Peter L. Kellerman , Brian Mackintosh , Frederick M. Carlson , David Morrell , Ala Moradian , Nandish Desai , Dawei Sun , Frank Sinclair
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Current Assignee: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B15/06 ; C30B15/00

Abstract:
A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.
Public/Granted literature
- US20180047864A1 SYSTEM AND METHOD FOR CRYSTALLINE SHEET GROWTH USING A COLD BLOCK AND GAS JET Public/Granted day:2018-02-15
Information query
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