Invention Grant
- Patent Title: Capacitive, ceramic pressure-measuring cell and method for the production thereof
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Application No.: US14896470Application Date: 2014-05-19
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Publication No.: US09958350B2Publication Date: 2018-05-01
- Inventor: Nils Ponath , Andreas Rossberg
- Applicant: Endress + Hauser GmbH + Co. KG
- Applicant Address: DE Maulburg
- Assignee: Endress + Hauser GmbH + Co. KG
- Current Assignee: Endress + Hauser GmbH + Co. KG
- Current Assignee Address: DE Maulburg
- Agency: Bacon & Thomas, PLLC
- Priority: DE102013106045 20130611
- International Application: PCT/EP2014/060186 WO 20140519
- International Announcement: WO2014/198490 WO 20141218
- Main IPC: G01L9/12
- IPC: G01L9/12 ; G01L9/00 ; B23K1/00 ; B23K1/19 ; C23C8/16 ; C23C14/00 ; C23C14/14 ; C23C14/34 ; B23K103/00

Abstract:
A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.
Public/Granted literature
- US20160131546A1 Capacitive, ceramic pressure-measuring cell and method for the production thereof Public/Granted day:2016-05-12
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