Invention Grant
- Patent Title: Particle detection apparatus and particle detection method
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Application No.: US15134538Application Date: 2016-04-21
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Publication No.: US09958372B2Publication Date: 2018-05-01
- Inventor: Yuho Matsuura
- Applicant: AZBIL CORPORATION
- Applicant Address: JP Chiyoda-ku
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-088349 20150423
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G01N15/02 ; G01N15/14 ; G01N15/00

Abstract:
A particle detection apparatus includes a plurality of photodetectors that detect reaction light generated at a particle irradiated with inspection light and generate electric signals in respective channels; pulse detectors that detect pulses of the electric signals in the respective channels; a correlating unit that correlates the pulse of the electric signal in a reference channel being a channel having a highest signal-to-noise (S/N) ratio, with the pulse of the electric signal in a channel other than the reference channel generated within a predetermined time difference range with respect to the pulse of the electric signal in the reference channel; and an attribute specifying unit that specifies an attribute of the particle on the basis of the correlated pulses of the electric signals.
Public/Granted literature
- US20160313250A1 PARTICLE DETECTION APPARATUS AND PARTICLE DETECTION METHOD Public/Granted day:2016-10-27
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