Invention Grant
- Patent Title: Imaging apparatus and imaging method
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Application No.: US14466181Application Date: 2014-08-22
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Publication No.: US09958399B2Publication Date: 2018-05-01
- Inventor: Takeshi Yamane , Tsuneo Terasawa
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2013-236685 20131115
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G02B19/00 ; G02B21/08 ; G01N21/956

Abstract:
According to one embodiment, an imaging apparatus includes a light source for illumination, a stage on which an imaging object illuminated by illumination light from the light source is to be placed, a critical illumination optical system configured to supply the illumination light to the imaging object placed on the stage, and to have a greater magnification in a first axis direction than in a second axis direction, an imaging optical system configured to form an image of the imaging object placed on the stage and illuminated using the critical illumination optical system, and a detector configured to detect the image of the imaging object formed by the imaging optical system, and to have a detection area longer in the first axis direction than in the second axis direction.
Public/Granted literature
- US20150138344A1 IMAGING APPARATUS AND IMAGING METHOD Public/Granted day:2015-05-21
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