Invention Grant
- Patent Title: Arrangement for X-Ray tomography
-
Application No.: US15728252Application Date: 2017-10-09
-
Publication No.: US09958403B1Publication Date: 2018-05-01
- Inventor: Pavel Stejskal , Marek Un{hacek over (c)}ovský , Tomá{hacek over (s)} Vystav{hacek over (e)}l , Alan Frank de Jong , Bart Buijsse , Pierre Bleuet
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Priority: EP16193273 20161011; EP16197127 20161103
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G01N23/04 ; G21K7/00

Abstract:
A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.
Public/Granted literature
- US20180100815A1 ARRANGEMENT FOR X-RAY TOMOGRAPHY Public/Granted day:2018-04-12
Information query