Invention Grant
- Patent Title: Inertial sensor
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Application No.: US14822419Application Date: 2015-08-10
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Publication No.: US09958472B2Publication Date: 2018-05-01
- Inventor: Yuudai Kamada , Atsushi Isobe , Noriyuki Sakuma , Takashi Oshima , Yuki Furubayashi
- Applicant: HITACHI, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI, LTD.
- Current Assignee: HITACHI, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2014-201587 20140930
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
A low-noise and high-sensitivity inertial sensor is provided.On the assumption that a movable portion VU1 and a movable portion VU2 are formed in the same SOI layer, the movable portion VU1 and the movable portion VU2 are mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitor 1 and the capacitance of a MEMS capacitor 2.
Public/Granted literature
- US20160091524A1 INERTIAL SENSOR Public/Granted day:2016-03-31
Information query
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