Invention Grant
- Patent Title: Optical scanner, manufacturing method of optical scanner, image display device, and head mounted display
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Application No.: US15228470Application Date: 2016-08-04
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Publication No.: US09958671B2Publication Date: 2018-05-01
- Inventor: Yasushi Mizoguchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-155307 20150805
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B27/01 ; B81B3/00 ; G02B27/10

Abstract:
An optical scanner includes a first Si layer, a second Si layer, and an SiO2 layer present between the Si layers. The optical scanner includes a movable section and shaft sections formed from the first Si layer, a holding section formed from the second Si layer and disposed to be separated from the movable section, a coupling section formed from the SiO2 layer and configured to couple the movable section and the holding section, and a light reflecting section provided on the upper surface of the holding section and configured to reflect light. The movable section and the coupling section are joined by direct joining.
Public/Granted literature
- US20170038578A1 OPTICAL SCANNER, MANUFACTURING METHOD OF OPTICAL SCANNER, IMAGE DISPLAY DEVICE, AND HEAD MOUNTED DISPLAY Public/Granted day:2017-02-09
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