Optical scanner, manufacturing method of optical scanner, image display device, and head mounted display
Abstract:
An optical scanner includes a first Si layer, a second Si layer, and an SiO2 layer present between the Si layers. The optical scanner includes a movable section and shaft sections formed from the first Si layer, a holding section formed from the second Si layer and disposed to be separated from the movable section, a coupling section formed from the SiO2 layer and configured to couple the movable section and the holding section, and a light reflecting section provided on the upper surface of the holding section and configured to reflect light. The movable section and the coupling section are joined by direct joining.
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