Invention Grant
- Patent Title: Spacer displacement device for a wafer illumination unit and wafer illumination unit
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Application No.: US15182945Application Date: 2016-06-15
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Publication No.: US09958795B2Publication Date: 2018-05-01
- Inventor: Matthias Conradi , Janusz Schulz
- Applicant: SUSS MicroTec Lithography GmbH
- Applicant Address: DE
- Assignee: SUSS MicroTec Lithography GmbH
- Current Assignee: SUSS MicroTec Lithography GmbH
- Current Assignee Address: DE
- Agency: Haynes Soloway PC
- Priority: NL2015170 20150715
- Main IPC: G03B27/62
- IPC: G03B27/62 ; G03F9/00 ; H01L21/67 ; H01L21/68 ; G03F7/20
Abstract:
A spacer displacement device for a wafer illumination unit comprises an actuator, a spacer which can be displaced between an active and an inactive position by the actuator, and a force transmission element which is coupled to the actuator. The force transmission element consists of wire.
Public/Granted literature
- US20170017169A1 Spacer Displacement Device for a Wafer Illumination Unit and Wafer Illumination Unit Public/Granted day:2017-01-19
Information query
