Invention Grant
- Patent Title: Method and apparatus for manufacturing single crystal
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Application No.: US15247032Application Date: 2016-08-25
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Publication No.: US09959611B2Publication Date: 2018-05-01
- Inventor: Ken Hamada
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2015-181376 20150915
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00

Abstract:
Disclosed herein is a method for manufacturing a single crystal, the method includes: photographing an image of a boundary portion between the single crystal and a melt by a camera during a single crystal pull-up process according to a Czochralski method; comparing at least one pixel included in a left side region with respect to an extension line of a pull-up shaft of the single crystal and at least one pixel included in a right side region with respect to the extension line; and determining an abnormality in a luminance distribution of the image from a result of the comparing.
Public/Granted literature
- US20170076437A1 METHOD AND APPARATUS FOR MANUFACTURING SINGLE CRYSTAL Public/Granted day:2017-03-16
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