Invention Grant
- Patent Title: Permanent magnetic chuck for OLED mask chucking
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Application No.: US14463825Application Date: 2014-08-20
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Publication No.: US09959961B2Publication Date: 2018-05-01
- Inventor: John M. White , Zuoqian Wang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01F7/02 ; G03F7/20
Abstract:
A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
Public/Granted literature
- US20150348812A1 PERMANENT MAGNETIC CHUCK FOR OLED MASK CHUCKING Public/Granted day:2015-12-03
Information query
IPC分类:
