Invention Grant
- Patent Title: Life enhancement of ring assembly in semiconductor manufacturing chambers
-
Application No.: US14270993Application Date: 2014-05-06
-
Publication No.: US09960019B2Publication Date: 2018-05-01
- Inventor: Sandhya Arun , Prashanth Kodigepalli , Padma Gopalakrishnan , Ashish Bhatnagar , Dan Martin , Christopher Heath John Hossack
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; H01L21/683 ; H01L21/687 ; C23C14/34 ; C23C14/50

Abstract:
The present invention generally relates to a ring assembly that may be used in an etching or other plasma processing chamber. The ring assembly generally includes an inner ring body having a top planar surface and a bottom planar surface, and an outer ring body having a top surface, a bottom surface substantially parallel to the top surface, and an inside surface that extends between the top surface and the bottom surface, the inside surface having a roof covering a portion of the inner ring body when the inner ring body is disposed adjacent the roof, wherein the inner ring body can be flipped into a different position so that a portion of the inner ring body that is not covered by the roof provides a substantially planar surface.
Public/Granted literature
- US20140238604A1 LIFE ENHANCEMENT OF RING ASSEMBLY IN SEMICONDUCTOR MANUFACTURING CHAMBERS Public/Granted day:2014-08-28
Information query