Invention Grant
- Patent Title: Method and apparatus for saving energy while increasing the conveying speed in vacuum coating plants
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Application No.: US15328818Application Date: 2015-08-05
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Publication No.: US09960020B2Publication Date: 2018-05-01
- Inventor: Gerd Kleideiter , Thomas Krisch , Joerg Fiukowski , Olaf Gawer
- Applicant: GRENZEBACH MASCHINENBAU GMBH
- Applicant Address: DE Asbach-Baeumenheim
- Assignee: GRENZEBACH MASCHINENBAU GMBH
- Current Assignee: GRENZEBACH MASCHINENBAU GMBH
- Current Assignee Address: DE Asbach-Baeumenheim
- Agency: Duane Morris LLP
- Agent J. Rodman Steele, Jr.; Gregory M. Lefkowitz
- Priority: DE102014011877 20140811
- International Application: PCT/DE2015/000397 WO 20150805
- International Announcement: WO2016/023533 WO 20160218
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/32 ; H01J37/34 ; C23C14/56 ; C23C14/52

Abstract:
Disclosed are an apparatus and a method for saving energy while increasing the conveying speed in vacuum coating plants consisting of a series of sputtering segments (3) and gas separation segments (2) along with a continuous substrate plane (1). Said apparatus has the following features: a) each of the sputtering segments (3) consists of a tank tub (12) inside which a conveying device (11) is located; the flange (6) of the tank is positioned in the immediate vicinity above the substrate plane (1); a cathode bearing block (5), along with targets (8) and gas inlet ducts (10), is located in the tank cover (4) in the immediate vicinity of the substrate together with splash guards (9); b) in the region of the substrate plane (1), the gas separation segments (2) are provided with a tunnel cover (14) that extends along the entire length of the gas separation segment (2); c) sputtering segments (3) and/or gas separation segments (2) are evacuated using one or more vacuum pumps (15), and the air pumped in said process is trapped in an air reservoir (25) having an adjustable volume.
Public/Granted literature
- US20170213708A1 METHOD AND APPARATUS FOR SAVING ENERGY WHILE INCREASING THE CONVEYING SPEED IN VACUUM COATING PLANTS Public/Granted day:2017-07-27
Information query
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