Invention Grant
- Patent Title: Device and method for treating substrate surfaces
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Application No.: US14346109Application Date: 2011-09-22
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Publication No.: US09960058B2Publication Date: 2018-05-01
- Inventor: Thomas Glinsner , Ronald Holzleitner , Thomas Wieser , Florian Schmid
- Applicant: Thomas Glinsner , Ronald Holzleitner , Thomas Wieser , Florian Schmid
- Applicant Address: AT St. Florian Am Inn
- Assignee: EV GROUP E. THALLNER GMBH
- Current Assignee: EV GROUP E. THALLNER GMBH
- Current Assignee Address: AT St. Florian Am Inn
- Agency: Kusner & Jaffe
- International Application: PCT/EP2011/066529 WO 20110922
- International Announcement: WO2013/041144 WO 20130328
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/02 ; H01L21/687

Abstract:
A device and method for treatment of a substrate treatment surface of a substrate with a fluid by immersion of the substrate treatment surface into the fluid. The device includes: receiving means for receiving the fluid with an immersion opening and immersion means for immersion of the substrate treatment surfaces through the immersion opening into the receiving means, Rotation means are provided for rotation of the receiving means for at least predominant discharge of the fluid from the receiving means.
Public/Granted literature
- US20140332036A1 DEVICE AND METHOD FOR TREATING SUBSTRATE SURFACES Public/Granted day:2014-11-13
Information query
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