Invention Grant
- Patent Title: Method for manufacturing electronic component and manufacturing apparatus of electronic component
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Application No.: US15253878Application Date: 2016-09-01
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Publication No.: US09960143B2Publication Date: 2018-05-01
- Inventor: Soichi Homma , Naoyuki Komuta
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Patterson & Sheridan, LLP
- Priority: JP2016-049686 20160314
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/66 ; H01L25/065 ; H01L25/00

Abstract:
A method for manufacturing an electronic component includes positioning a first surface of a first component facing a second surface of a second component in a first state. The first surface has a first pad having a first center. The second surface has a second pad having a second center. At least one of the first or second pads includes a metal member. The method includes melting the metal member and moving the first and second components until the melted metal member contacts both pads, moving at least one of the first or second components in a direction along the first surface, and solidifying the metal member in a second state. A first distance in a direction along the first surface between the first and second centers in the first state is longer than a second distance in the direction between the first and second centers in the second state.
Public/Granted literature
- US20170263585A1 METHOD FOR MANUFACTURING ELECTRONIC COMPONENT AND MANUFACTURING APPARATUS OF ELECTRONIC COMPONENT Public/Granted day:2017-09-14
Information query
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