Invention Grant
- Patent Title: Method of forming a single metal that performs N work function and P work function in a high-k/metal gate process
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Application No.: US14013960Application Date: 2013-08-29
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Publication No.: US09960160B2Publication Date: 2018-05-01
- Inventor: Yih-Ann Lin , Ryan Chia-Jen Chen , Donald Y. Chao , Yi-Shien Mor , Kuo-Tai Huang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/28 ; H01L21/8238 ; H01L29/49 ; H01L29/51

Abstract:
The present disclosure describes a semiconductor device. The device includes a semiconductor substrate, an isolation structure formed in the substrate for isolating a first active region and a second active region, a first transistor formed in the first active region, the first transistor having a high-k gate dielectric layer and a metal gate with a first work function formed over the high-k gate dielectric layer, and a second transistor formed in the second active region, the second transistor having the high-k gate dielectric layer and a metal gate with a second work function formed over the high-k gate dielectric layer. The metal gates are formed from at least a single metal layer having the first work function and the second work function.
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