Invention Grant
- Patent Title: Flipped vertical field-effect-transistor
-
Application No.: US15617472Application Date: 2017-06-08
-
Publication No.: US09960164B2Publication Date: 2018-05-01
- Inventor: Kangguo Cheng , Xin Miao , Wenyu Xu , Chen Zhang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini Bianco PL
- Agent Thomas S. Grzesik
- Main IPC: H01L29/768
- IPC: H01L29/768 ; H01L29/80 ; H01L29/76 ; H01L21/00 ; H01L21/8238 ; H01L21/336 ; H01L27/092 ; H01L29/78 ; H01L29/66 ; H01L21/768 ; H01L23/535

Abstract:
Various embodiments disclose a method for fabricating vertical transistors. In one embodiment, a structure is formed comprising at least a first substrate, an insulator layer on the substrate, a first doped layer on the insulator layer, at least one fin structure in contact with the doped layer, a dielectric layer surrounding a portion of the fin structure, a gate layer on the dielectric layer, a second doped layer in contact with the fin structure, a first contact area in contact with the second doped layer, and at least a first interconnect in contact with the first contact area. The structure is flipped bonded to a second substrate. The first substrate and the insulator layer are removed to expose the first doped layer. A second contact area is formed in contact with the first doped layer. At least a second interconnect is formed in contact with the second contact area.
Public/Granted literature
- US20170309631A1 FLIPPED VERTICAL FIELD-EFFECT-TRANSISTOR Public/Granted day:2017-10-26
Information query
IPC分类: