Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US15463582Application Date: 2017-03-20
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Publication No.: US09960179B2Publication Date: 2018-05-01
- Inventor: Kenta Yamada
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/11582 ; H01L27/1157 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L29/04 ; H01L29/16 ; H01L21/28

Abstract:
A semiconductor memory device includes a conductive layer; electrode layers stacked on the conductive layer; an insulating body extending through the electrode layers; and a semiconductor layer positioned between the insulating body and the electrode layers. The plurality of electrode layers include a first electrode layer, a second electrode layer provided between the conductive layer and the first electrode layer, and a third electrode layer provided between the conductive layer and the second electrode layer, and the semiconductor layer has a first layer thickness between the insulating body and the first electrode layer, a second layer thickness between the insulating body and the second electrode layer and a third layer thickness between the insulating body and the third electrode layer. The first layer thickness is thinner than the second layer thickness, and the second layer thickness is thinner than the third layer thickness.
Public/Granted literature
- US20180083031A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-03-22
Information query
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