Invention Grant
- Patent Title: Three-dimensional semiconductor memory device and method of fabricating the same
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Application No.: US15634555Application Date: 2017-06-27
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Publication No.: US09960182B2Publication Date: 2018-05-01
- Inventor: Ji-Hoon Choi , SeungHyun Lim , Sunggil Kim , HongSuk Kim , Hunhyeong Lim , Hyunjun Sim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0036839 20150317
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/10 ; H01L27/11582 ; H01L27/11565 ; H01L27/1157

Abstract:
A semiconductor memory device includes a stack including gate electrodes sequentially stacked on a substrate, a vertical insulating structure penetrating the stack vertically with respect to the gate electrodes, a vertical channel portion disposed on an inner side surface of the vertical insulating structure, and a common source region formed in the substrate and spaced apart from the vertical channel portion. A bottom region of the vertical channel portion has a protruding surface in contact with a bottom region of the vertical insulating structure.
Public/Granted literature
- US20170301689A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2017-10-19
Information query
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