Invention Grant
- Patent Title: Avalanche photodiode using silicon nanowire and silicon nanowire photomultiplier using the same
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Application No.: US15212084Application Date: 2016-07-15
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Publication No.: US09960299B2Publication Date: 2018-05-01
- Inventor: Suk Won Jung , Yeon Shik Choi , Young Chang Jo , Jae Gi Son , Ki Man Jeon , Woo Kyeong Seong , Kook Nyung Lee , Min Ho Lee , Hyuck Ki Hong
- Applicant: KOREA ELECTRONICS TECHNOLOGY INSTITUTE
- Applicant Address: KR Seongnam-si
- Assignee: KOREA ELECTRONICS TECHNOLOGY INSTITUTE
- Current Assignee: KOREA ELECTRONICS TECHNOLOGY INSTITUTE
- Current Assignee Address: KR Seongnam-si
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: KR10-2015-0188463 20151229
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01L27/02 ; H01L27/144 ; H01L31/0224 ; H01L31/028 ; H01L31/107 ; H01L31/18

Abstract:
Disclosed is an avalanche photodiode using a silicon nanowire, including a first silicon nanowire formed of silicon (Si), a first conductive region formed by doping one surface of the first silicon nanowire with a first dopant, and a second conductive region formed by doping one surface of the first silicon nanowire with a second dopant having a conductive type different from that of the first dopant so as to be arranged continuously in a longitudinal direction from the first conductive region, wherein, when the magnitude of a reverse voltage applied to both ends of the first silicon nanowire is equal to or greater than a preset breakdown voltage, avalanche multiplication of inner current occurs due to the incidence of light from the outside.
Public/Granted literature
- US20170186895A1 AVALANCHE PHOTODIODE USING SILICON NANOWIRE AND SILICON NANOWIRE PHOTOMULTIPLIER USING THE SAME Public/Granted day:2017-06-29
Information query
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