- Patent Title: Method for producing a thin film made of lead zirconate titanate
-
Application No.: US13985646Application Date: 2012-02-13
-
Publication No.: US09960344B2Publication Date: 2018-05-01
- Inventor: Carsten Giebeler , Neil Conway
- Applicant: Carsten Giebeler , Neil Conway
- Applicant Address: GB Edinburgh
- Assignee: Pyreos LTD
- Current Assignee: Pyreos LTD
- Current Assignee Address: GB Edinburgh
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102011000752 20110215
- International Application: PCT/EP2012/052419 WO 20120213
- International Announcement: WO2012/110458 WO 20120823
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01L41/187 ; C23C14/00 ; C23C14/08 ; H01L21/02 ; H01L37/02 ; H01L41/316

Abstract:
The invention relates to a method for producing the thin film made of lead zirconate titanate in a 111-oriented perovskite structure, comprising the following steps: providing a substrate having a substrate temperature above 450° C. and a lead target, a zirconium target, and a titanium target; applying the thin film by sputtering lead, zirconium, and titanium from the respective targets onto the substrate, wherein the total deposition rate of lead, zirconium, and titanium is greater than 10 nm/min, the deposition rate of zirconium is selected in such a way that the atomic concentration of zirconium with respect to the atomic concentration of zirconium together with titanium in the thin film is between 0.2 and 0.3, and the deposition rate of lead is selected to be sufficiently low, depending on the substrate temperature and the total deposition rate of lead, zirconium, and titanium, for an X-ray diffractometer graph of the 111-oriented lead zirconate titanate to have a significant peak value (19) in a diffraction angle range from 33 to 35.5°; and completing the thin film.
Public/Granted literature
- US20140049136A1 METHOD FOR PRODUCING A THIN FILM MADE OF LEAD ZIRCONATE TITANATE Public/Granted day:2014-02-20
Information query
IPC分类: