Invention Grant
- Patent Title: MEMS microphone package
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Application No.: US15305519Application Date: 2015-04-17
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Publication No.: US09961452B2Publication Date: 2018-05-01
- Inventor: Jay S. Salmon
- Applicant: Robert Bosch GmbH
- Applicant Address: US PA Pittsburgh DE Stuttgart
- Assignee: Akustica, Inc.,Robert Bosch GmbH
- Current Assignee: Akustica, Inc.,Robert Bosch GmbH
- Current Assignee Address: US PA Pittsburgh DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- International Application: PCT/US2015/026320 WO 20150417
- International Announcement: WO2015/164192 WO 20151029
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/04 ; B81B3/00 ; B81B7/00 ; H04R1/02 ; H04R19/00 ; B81C1/00 ; H04R31/00

Abstract:
In one embodiment a micro-electro-mechanical system (MEMS) microphone package includes a multiple layer substrate, an upper acoustic port formed through a plurality of upper layers of the multiple layer substrate and exposing an upper surface of a membrane portion, a lower acoustic port formed through a plurality of lower layers of the multiple layer substrate and exposing a lower surface of the membrane portion, a ring trench formed through at least one of the plurality of upper layers and exposing a metal ring, a MEMS die located above the ring trench, a copper pillar ring extending between the metal ring and the MEMS die, and a solder pillar ring positioned on a first surface of the copper pillar ring, the copper pillar ring and solder pillar ring attaching the MEMS die to the metal ring.
Public/Granted literature
- US20170048625A1 MEMS Microphone Package Public/Granted day:2017-02-16
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