Invention Grant
- Patent Title: Method of producing cured product and method of forming pattern
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Application No.: US14366250Application Date: 2012-12-12
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Publication No.: US09961776B2Publication Date: 2018-05-01
- Inventor: Tatsuya Suzuki , Toshiki Ito , Chieko Mihara
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2011-277713 20111219
- International Application: PCT/JP2012/082982 WO 20121212
- International Announcement: WO2013/094660 WO 20130627
- Main IPC: H05K3/00
- IPC: H05K3/00 ; H01L21/308

Abstract:
The present invention provides a photo-curable composition that requires a small mold-releasing force in a method of producing a cured product and also provides a method of producing a cured product with a small mold-releasing force. The method of producing a cured product includes applying a photo-curable composition onto a base material; pressing a mold to the photo-curable composition to form a pattern in the photo-curable composition; irradiating the photo-curable composition provided with the pattern with first light to generate a cured product having the pattern; and releasing the mold from the cured product, wherein a gas-generating region is formed from a gas-generating agent between the cured product and the mold; the gas-generating region is irradiated with second light to generate a gas in the gas-generating region; and the mold is released from the cured product after the generation of the gas or simultaneously with the generation of the gas.
Public/Granted literature
- US20140363584A1 METHOD OF PRODUCING CURED PRODUCT AND METHOD OF FORMING PATTERN Public/Granted day:2014-12-11
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