Invention Grant
- Patent Title: Polishing apparatus, method for controlling the same, and method for outputting a dressing condition
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Application No.: US15071091Application Date: 2016-03-15
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Publication No.: US09962804B2Publication Date: 2018-05-08
- Inventor: Hiroyuki Shinozaki
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2015-056922 20150319
- Main IPC: B24B37/00
- IPC: B24B37/00 ; B24B37/005

Abstract:
A polishing apparatus includes: a turntable for supporting a polishing pad; a turntable rotation mechanism configured to rotate the turntable; a dresser configured to dress the polishing pad; and a scanning mechanism configured to cause the dresser to scan between a first position and a second position on the polishing pad, wherein Ttt/Tds and Tds/Ttt are a non-integer where the Ttt is a rotation cycle of the turntable during dressing, and the Tds is a scanning cycle during which the dresser scans between the first position and the second position.
Public/Granted literature
- US20160271749A1 POLISHING APPARATUS, METHOD FOR CONTROLLING THE SAME, AND METHOD FOR OUTPUTTING A DRESSING CONDITION Public/Granted day:2016-09-22
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