The disclosure relates to a method of making nanotube film. The method includes following steps. A free-standing carbon nanotube film is provided. The carbon nanotube film includes a number of carbon nanotubes aligned and connected with each other via van der Waals force. The carbon nanotube film is suspended and defects are induced on the surface of the carbon nanotubes. A nano-material layer is grown on the surface of the carbon nanotubes via atomic layer deposition. The carbon nanotube film is removed by annealing to form a number of nanotubes; wherein the number of nanotubes are successively aligned and connected with each other to form a free-standing nanotube film.