Invention Grant
- Patent Title: Functionally graded material by in-situ gradient alloy sputter deposition management
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Application No.: US14706032Application Date: 2015-05-07
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Publication No.: US09963778B2Publication Date: 2018-05-08
- Inventor: Hans-Juergen Eickelmann , Thorsten Muehge , Erik Rueger , Markus Schmidt
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Lieberman & Brandsdorfer, LLC
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/54 ; C23C14/02 ; H01J37/32 ; H01J37/34

Abstract:
Embodiments relate to a sputter chamber comprising both a target surface and an anode surface. The sputter chamber has both an ingress and an egress to allow passage of a gas. The sputter chamber further includes a target substrate. A secondary material flexibly changes the composition of the target substrate in-situ by changing coverage of the target by the secondary material. Gas entering the sputter chamber interacts with the changed composition of the target. The interaction discharges a plasma alloy and the alloy condenses on the anode surface in the sputter chamber. The condensed alloy produces an alloy film.
Public/Granted literature
- US20160326631A1 Functionally Graded Material By In-Situ Gradient Alloy Sputter Deposition Management Public/Granted day:2016-11-10
Information query
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