Invention Grant
- Patent Title: Electroplating solution analyzing apparatus
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Application No.: US14939240Application Date: 2015-11-12
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Publication No.: US09964518B2Publication Date: 2018-05-08
- Inventor: Naoto Nakayama
- Applicant: HIOKI DENKI KABUSHIKI KAISHA
- Applicant Address: JP Nagano
- Assignee: HIOKI DENKI KABUSHIKI KAISHA
- Current Assignee: HIOKI DENKI KABUSHIKI KAISHA
- Current Assignee Address: JP Nagano
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2014-236183 20141121; JP2014-236185 20141121; JP2015-162997 20150820; JP2015-163000 20150820
- Main IPC: G01N27/42
- IPC: G01N27/42 ; G01N27/48 ; C25D21/12

Abstract:
An electroplating solution analyzing apparatus measures a first current that flows between a counter electrode and a working electrode placed in electroplating solution while depositing metal on the working electrode by applying a set first voltage between a reference electrode and the working electrode and then measures a second current that flows between the counter electrode and the working electrode with a cycle set in advance while dissolving the metal deposited on the working electrode into the electroplating solution by applying a second voltage, which changes at a rate set in advance, between the reference electrode and the working electrode. During measurement, the first voltage is changed in a range set to produce a current density within a current density range set in advance. An analysis process then analyzes the state of the electroplating solution based on the values acquired by measurement.
Public/Granted literature
- US20160146757A1 ELECTROPLATING SOLUTION ANALYZING APPARATUS Public/Granted day:2016-05-26
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