Invention Grant
- Patent Title: Acceleration sensor
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Application No.: US14813329Application Date: 2015-07-30
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Publication No.: US09964561B2Publication Date: 2018-05-08
- Inventor: Hiroshi Hamamura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2013-025131 20130213
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01P15/18 ; B81B3/00 ; H01L29/84
Abstract:
An acceleration sensor includes weights, a support, and beams on which piezoresistive elements are disposed. The weights include projections and recesses. The support includes projections and recesses. The beams are connected to the projections and the recesses.
Public/Granted literature
- US20150331010A1 ACCELERATION SENSOR Public/Granted day:2015-11-19
Information query
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