Invention Grant
- Patent Title: Capacitance type physical quantity sensor
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Application No.: US14405177Application Date: 2013-06-06
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Publication No.: US09964562B2Publication Date: 2018-05-08
- Inventor: Akira Ogawa
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: POSZ Law Group, PLC
- Priority: JP2012-134224 20120613; JP2013-103188 20130515
- International Application: PCT/JP2013/003546 WO 20130606
- International Announcement: WO2013/187018 WO 20131219
- Main IPC: G01P15/135
- IPC: G01P15/135 ; G01P15/13 ; G01P15/125 ; G01P15/08 ; G01P15/18 ; G01C19/5747

Abstract:
A capacitance type physical quantity sensor including a movable electrode formed in a weight part, and a fixed electrode facing the movable electrode is provided. A first movable sensing electrode and a first fixed sensing electrode face each other in a first y direction. A second movable sensing electrode and a second fixed sensing electrode face each other in a second y direction. A first movable damping electrode is located in the middle between two first fixed damping electrodes, faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of the first movable damping electrodes are located point-symmetrically with respect to the center of the weight part or line-symmetrically with respect to a center line passing the center in the y direction.
Public/Granted literature
- US20150143906A1 CAPACITANCE TYPE PHYSICAL QUANTITY SENSOR Public/Granted day:2015-05-28
Information query
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