Invention Grant
- Patent Title: Apparatus and method of manufacturing radiation detection panel
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Application No.: US15697162Application Date: 2017-09-06
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Publication No.: US09964652B2Publication Date: 2018-05-08
- Inventor: Hitoshi Chiyoma , Atsuya Yoshida , Wataru Matsuyama , Toyoo Yamamoto , Hiroshi Aida , Yuichi Shimba
- Applicant: TOSHIBA ELECTRON TUBES & DEVICES CO., LTD.
- Applicant Address: JP Otawara-shi
- Assignee: TOSHIBA ELECTRONIC TUBES & DEVICES CO., LTD.
- Current Assignee: TOSHIBA ELECTRONIC TUBES & DEVICES CO., LTD.
- Current Assignee Address: JP Otawara-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-276157 20111216; JP2011-276158 20111216; JP2011-276207 20111216; JP2011-276208 20111216
- Main IPC: G01T1/20
- IPC: G01T1/20 ; C23C14/50 ; C23C14/24 ; C23C14/06 ; G01T1/202 ; C23C14/22
Abstract:
According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.
Public/Granted literature
- US20170363752A1 APPARATUS AND METHOD OF MANUFACTURING RADIATION DETECTION PANEL Public/Granted day:2017-12-21
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